Элементный состав и свойства поверхности тонких пленок металлов, нанесенных на подложки кремния

Abstract

In this paper a composite structure, topography and nanohardness of a surface (100) Si modified by means of ion-assisted deposition of coatings in conditions of a self-irradiation are discussed. Rutherford backscattering (RBS) of He+ ions and computer program RUMP were applied to investigate an composition of surface. It is established, that coating includes atoms of metal, hydrogen, carbon, oxygen, silicon. The nanoindentation data from coated systems were used for calculation of the hardness and elastic modulus using load and displacement sensing indentation experiments. Atomic Force Microscopy (AFM) surface observations were used to investigate the topography of modified surfaces.