Surface morphological properties of Mo-based thin films on glass

Abstract

Investigation of influence of Mo deposition on glass substrates by SIAD on its topography and wettability was conducted. We observe some steps in the process of film growth. It was indicated that with an increase of the irradiation dose, the average roughness and the contact angle increases rapidly at first and then decreases. Contact angle measurements showed that deposition of the Mo thin films on glass makes the surface less hydrophilic.