Механические свойства и топография поверхности кремния, модифицированного ионно-ассистированным осаждением покрытий

Abstract

The article is devoted to investigation of mechanical properties of silicon surface modified by means of self ion assisted deposition of C, Ti, Mo coatings. The nanoindentation data from coated systems were used for calculation of the hardness and elastic modulus. Atomic Force Microscopy surface observations were used to investigate the topography of modified surfaces.