Surface properties of Me/Si structures prepared by means of self-ion assisted deposition
| dc.contributor.author | Tashlykov, I. S. | |
| dc.contributor.author | Zhukowski, P. | |
| dc.contributor.author | Mikhalkovich, O. | |
| dc.contributor.author | Baraishuk, S. | |
| dc.date.accessioned | 2015-06-05T09:09:46Z | |
| dc.date.available | 2015-06-05T09:09:46Z | |
| dc.date.issued | 2014 | |
| dc.description.abstract | In this paper a composite structure, topography, wettability and nanohardness of a (100) Si surface modified by means of ion-assisted deposition of metal (Me) coatings in conditions of a self-irradiation are discussed. | ru_RU |
| dc.identifier.uri | http://elib.bspu.by/handle/doc/5173 | |
| dc.language.iso | en | ru_RU |
| dc.relation.ispartofseries | Acta Physica Polonica A;vol. 125, No.6, pp. 1306-1308 | |
| dc.subject | Me/Si structures | ru_RU |
| dc.subject | composition | ru_RU |
| dc.subject | wettability | ru_RU |
| dc.subject | nanohardness | ru_RU |
| dc.subject | БГПУ | |
| dc.title | Surface properties of Me/Si structures prepared by means of self-ion assisted deposition | ru_RU |
| dc.type | Article | ru_RU |