Composition of Co films/Si substrate systems prepared by means of self-ion assisted deposition and accompanying silicon damage

dc.contributor.authorTashlykov, I. S.
dc.contributor.authorZhukowski, Pawel
dc.contributor.authorMikhalkovich, Oleg
dc.contributor.authorErmakov, Yuri
dc.contributor.authorChernysh, Vladimir
dc.date.accessioned2018-02-23T07:16:51Z
dc.date.available2018-02-23T07:16:51Z
dc.date.issued2010
dc.description.abstractComposition of Co films/Si substrate systems prepared by means of self-ion assisted deposition and accompanying silicon damage.ru_RU
dc.identifier.urihttp://elib.bspu.by/handle/doc/31086
dc.language.isoenru_RU
dc.relation.ispartofseriesPrzegląd elektrotechniczny (Electrical Review);r. 86, nr 7, pp. 122–124
dc.subjectБГПУru_RU
dc.subjectCo/Si structuresru_RU
dc.subjectcompositionru_RU
dc.subjectdamageru_RU
dc.subjecttopographyru_RU
dc.titleComposition of Co films/Si substrate systems prepared by means of self-ion assisted deposition and accompanying silicon damageru_RU
dc.typeArticleru_RU

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