Non-destructive quality control and microanalysis of ion-implanted solids
| dc.contributor.author | Tashlykov, I. S. | |
| dc.date.accessioned | 2016-01-21T11:20:11Z | |
| dc.date.available | 2016-01-21T11:20:11Z | |
| dc.date.issued | 1982 | |
| dc.description.abstract | Non-destructive nuclear physics testing techniques the Rutherford backscattering in conjunction with ion channeling method and method of nuclear reactions have been used to control quality and element composition of singl-crystal GaAs implanted by Al+. | ru_RU |
| dc.identifier.uri | http://elib.bspu.by/handle/doc/9221 | |
| dc.language.iso | en | ru_RU |
| dc.relation.ispartofseries | 10 World conference on non-destructive testing. Moscow, 1982;pp. 150–157 | |
| dc.subject | БГПУ | ru_RU |
| dc.subject | non-destructive quality control and microanalysis | ru_RU |
| dc.subject | ion implantation | ru_RU |
| dc.subject | solid | ru_RU |
| dc.title | Non-destructive quality control and microanalysis of ion-implanted solids | ru_RU |
| dc.type | Article | ru_RU |